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Journal of Materials Science Letters

, Volume 11, Issue 8, pp 515–517 | Cite as

Mechanical properties of diamond thin films prepared by chemical vapour deposition

  • Y. Seino
  • N. Hida
  • S. Nagai
Article

Keywords

Polymer Mechanical Property Thin Film Chemical Vapour Deposition Vapour Deposition 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Chapman & Hall 1992

Authors and Affiliations

  • Y. Seino
    • 1
  • N. Hida
    • 1
  • S. Nagai
    • 1
  1. 1.National Research Laboratory of MetrologyIbarakiJapan

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