Journal of Materials Science Letters

, Volume 11, Issue 8, pp 515–517 | Cite as

Mechanical properties of diamond thin films prepared by chemical vapour deposition

  • Y. Seino
  • N. Hida
  • S. Nagai


Polymer Mechanical Property Thin Film Chemical Vapour Deposition Vapour Deposition 
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Copyright information

© Chapman & Hall 1992

Authors and Affiliations

  • Y. Seino
    • 1
  • N. Hida
    • 1
  • S. Nagai
    • 1
  1. 1.National Research Laboratory of MetrologyIbarakiJapan

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