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Epitaxial deposition of silicon nitride during post-sintering heat treatment

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Max-Planck-Institut für Metallforschung, Skestr. 92, 700, Stuttgart, FRG

    J. S. Vetrano, H. -J. Kleebe, E. Hampp & M. J. Hoffmann

  2. University of California, Berkeley, CA, USA

    R. M. Cannon

Authors
  1. J. S. Vetrano
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  2. H. -J. Kleebe
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  3. E. Hampp
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  4. M. J. Hoffmann
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  5. R. M. Cannon
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Vetrano, J.S., Kleebe, H.J., Hampp, E. et al. Epitaxial deposition of silicon nitride during post-sintering heat treatment. J Mater Sci Lett 11, 1249–1252 (1992). https://doi.org/10.1007/BF00729782

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  • DOI: https://doi.org/10.1007/BF00729782

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