Journal of Materials Science Letters

, Volume 11, Issue 15, pp 1023–1025 | Cite as

Effect of high substrate temperatures of crystalline growth of Al2O3 films deposited by reactive evaporation

  • Zhi Chen
  • Mao-Chang Jin
Article

Keywords

Polymer Evaporation Al2O3 Substrate Temperature High Substrate 

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Copyright information

© Chapman & Hall. 1992

Authors and Affiliations

  • Zhi Chen
    • 1
  • Mao-Chang Jin
    • 1
  1. 1.Center for Materials Analysis, Department of Materials Science and EngineeringUniversity of Electronic Science and Technology of ChinaChengduPeople's Republic of China

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