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Angular distribution of sputtered atoms from Al-Sn alloy and surface topography

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Journal of Materials Science Letters

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Wang, Z., Pan, J., Zhang, J. et al. Angular distribution of sputtered atoms from Al-Sn alloy and surface topography. J Mater Sci Lett 11, 719–720 (1992). https://doi.org/10.1007/BF00729470

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  • DOI: https://doi.org/10.1007/BF00729470

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