References
N. IWAMOTO, Y. MAKINO and W. KAMAI,Thin Solid Films 153 (1987) 233.
P. J. MARTIN,J. Mater. Sci. 21 (1986) 1.
K.-H. MULLER,J. Vacuum Sci. Technol. A4 (1986) 184.
Y. S. TANG, B. J. SEALY and N. K. HUANG,Nucl. Instrum. Methods B in press.
N. K. HUANG,Thin Film Sci. Technol. (Chinese) in press.
O. PUGLISI, A. TORRISI and G. MARLETTA,J. Non-Cryst. Solids 68 (1984) 219.
J. S. JEN and M. R. KALINOWSKI, ibid.38–39 (1989) 21.
C. MORANT, J. M. SANZ, L. GALAN, L. SORIANO and F. RUEDA,Surf. Sci. 218 (1989) 331.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Huang, N.K. X-ray photoelectron spectroscopy studies of the surface of ion-beam reactive sputter deposited zirconia films. J Mater Sci Lett 11, 681–683 (1992). https://doi.org/10.1007/BF00728905
Received:
Accepted:
Issue Date:
DOI: https://doi.org/10.1007/BF00728905