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Preparation of Zr-B films by r.f. sputtering

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Department of Applied Chemistry, Faculty of Engineering, Okayama University, 700, Okayama, Japan

    K. Oda & T. Yoshio

  2. Department of Industrial Chemistry, Yonago National College of Technology, 683, Yonago, Japan

    K. Oda

Authors
  1. K. Oda
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  2. T. Yoshio
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Oda, K., Yoshio, T. Preparation of Zr-B films by r.f. sputtering. J Mater Sci Lett 9, 1080–1082 (1990). https://doi.org/10.1007/BF00727882

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  • DOI: https://doi.org/10.1007/BF00727882

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