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Chemical vapour deposition of TiN layers in various glow discharge regions

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Journal of Materials Science Letters

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References

  1. K-RIE. TH. LAMPE and ST. EISENBERG, HTM 42 (1987) Vol. 3, pp. 153–159.

  2. T. WIERZCHOŃ, J. MICHALSKI and T. KARPINSKI, in Proceedings of 1st International Conference on Plasma Surface Engineering, Garnisch-Partenkirchen, 1988, p. 177.

  3. E. ROLINSKI, “Ion Nitriding of Titanium and its Alloys” (Warsaw Technical University, z. 112 Warsaw, 1988).

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  4. T. WIERZCHOŃ, “Formation of Iron Borides on Steel under Glow Discharge Conditions” (Warsaw Technical University, z. 101 Warsaw, 1986).

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Authors and Affiliations

  1. Institute of Materials Science and Engineering, Warsaw Technical University, ul. Narbutta 85, 02-524, Warsaw, Poland

    J. Michalski & T. Wierzchoń

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  1. J. Michalski
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  2. T. Wierzchoń
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Michalski, J., Wierzchoń, T. Chemical vapour deposition of TiN layers in various glow discharge regions. J Mater Sci Lett 10, 506–508 (1991). https://doi.org/10.1007/BF00726920

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  • DOI: https://doi.org/10.1007/BF00726920

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