Skip to main content
SpringerLink
Log in

Structure and useful properties of multi-component titanium nitride obtained by pulse plasma deposition

  • Published:
Journal of Materials Science Letters

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

References

  1. R. BUHL, H. PULKER and E. MOLL,Thin Solid Films 80 (1981) 265.

    Google Scholar 

  2. J. M. MOLARIUS and A. S. KORHONEN,J. Vac. Sci. Technol. A3 (1985) 2419.

    Google Scholar 

  3. A. MICHALSKI, A. SOKOLOWSKA and S. LEGUTKO,Thin Solid Films 129 (1985) 249.

    Google Scholar 

  4. O. KNOTEK, M. BÖHMER and T. LEYENDECKER,J. Vac. Sci. Technol. A4 (1986) 2695.

    Google Scholar 

  5. U. KÖNIG,Surf. Coat. Technol. 33 (1987) 91.

    Google Scholar 

  6. H. FRELLER and H. HAESSLER,Thin Solid Films 153 (1987) 67.

    Google Scholar 

  7. H. A. JEHN, S. HOFMANN and W-D. MÜNZ, ibid.153 (1987) 45.

    Google Scholar 

  8. J. M. MOLARIUS, A. S. KORHONEN, E. HARJU and LAPPALAINEN,Surf. Coat. Technol. 33 (1987) 117.

    Google Scholar 

  9. H. FRELLER and H. HAESSLER,Thin Solid Films 153 (1987) 67.

    Google Scholar 

  10. O. KNOTEK, T. LEYENDECKER and F. JUNGBLUT, ibid.153 (1987) 87.

    Google Scholar 

  11. O. KNOTEK, M. BÖHNER, T. LEYENDECKER and F. JUNGBLUT,J. Mater. Sci. Eng. A105 (1988) 481.

    Google Scholar 

  12. A. MICHALSKI and A. SOKOLOWSKA,J. Mater. Sci. Lett. 3 (1984) 505.

    Google Scholar 

  13. Idem.J. Mater. Sci. 20 (1985) 1842.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Institute of Materials Science and Engineering, Warsaw University of Technology, ul. Narbutta 85, 02-524, Warsaw, Poland

    A. Michalski

Authors
  1. A. Michalski
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Michalski, A. Structure and useful properties of multi-component titanium nitride obtained by pulse plasma deposition. J Mater Sci Lett 10, 503–505 (1991). https://doi.org/10.1007/BF00726919

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00726919

Keywords

Search

Navigation