Skip to main content
SpringerLink
Log in

Thermochemical etching effect on CVD diamond film in an oxygen atmosphere

  • Published:
Journal of Materials Science Letters

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

References

  1. B. V. SPITSYN, L. L. BOUILOV and B. V. DERJAGUIN,J. Cryst. Growth 52 (1981) 219.

    Google Scholar 

  2. S. MATSUMOTO, Y. SATO, M. KAMO and N. SETAKA,Jpn. J. Appl. Phys. 21 (1982) L183.

  3. R. MANIA, L. STOBIERSKI and R. PAMPUCH,Cryst. Res. Technol. 16 (1981) 785.

    Google Scholar 

  4. Y. HIROSE and Y. TERASAWA,Jpn. J. Appl. Phys. 25 (1986) L519.

    Google Scholar 

  5. Y. SAITO, K. SATO, H. TANAKA, K. FUJITA and S. MATUDA,J. Mater. Sci. 23 (1988) 842.

    Google Scholar 

  6. T. KAWATO and K. KONDO,Jpn. J. Appl. Phys. 26 (1987) 1429.

    Google Scholar 

  7. Y. HIROSE, in Proceedings of First International Conference on the New Diamond Science and Technology, Japan New Diamond Forum (Keidanren Kaikan, Tokyo, 1988) p. 38.

  8. Y. SATO, C. HATA and M. KAMO,ibid. p. 50.

  9. N. UCHIDA, T. KURITA, K. UEMATSU and K. SAITO,J. Mater. Sci. Lett.

Download references

Author information

Authors and Affiliations

  1. Department of Chemistry, Nagaoka University of Technology, Kamitomioka 1603-1, 940-21, Nagaoka, Niigata, Japan

    Nozomu Uchida, Tsutomu Kurita, Keizo Uematsu & Katsuichi Saito

Authors
  1. Nozomu Uchida
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Tsutomu Kurita
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Keizo Uematsu
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Katsuichi Saito
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Uchida, N., Kurita, T., Uematsu, K. et al. Thermochemical etching effect on CVD diamond film in an oxygen atmosphere. J Mater Sci Lett 9, 249–250 (1990). https://doi.org/10.1007/BF00725813

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00725813

Keywords

Search

Navigation