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Zinc oxide thin films prepared by chemical vapour deposition from zinc acetate

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Journal of Materials Science Letters

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References

  1. C. K. LAU, S. K. TIKU and K. M. LAKIN,J. Electrochem. Soc. 127 (1980) 1843.

    Google Scholar 

  2. A. P. ROTH and D. F. WILLIAMS, ibid.128 (1981) 2684.

    Google Scholar 

  3. F. T. J. SMITH,Appl. Phys. Lett. 43 (1983) 1108.

    Google Scholar 

  4. T. MARUYAMA and A. NAKAI,Jpn. J. Appl. Phys. 28 (1989) L346.

    Google Scholar 

  5. L. A. RYABOVA, YA. S. SAVITSKAYA and R. N. SHEFTAL,Izv. Akad. Nauk. SSSR: Neorg. Mater. 4 (1968) 602.

    Google Scholar 

  6. V. F. KORZO, P. S. KIREEV and G. A. LYASH-CHENKO,Inorg. Mater. 5 (1969) 304.

    Google Scholar 

  7. O. F. Z. KHAN and P. O'BRIEN,Thin Solid Films 173 (1989) 95.

    Google Scholar 

  8. K. KAMATA and S. MATSUMOTO,Yogyo-Kyokai-Shi 89 (1981) 337.

    Google Scholar 

  9. C. EBERSPACHER, A. L. FARENBRUCH and R. H. BUBE,Thin Solid Films 136 (1986) 1.

    Google Scholar 

  10. M. TAMMENMAA, T. KOSKINEN, L. HILTUNEN, L. NINISTO and M. LESKELA, ibid.124 (1985) 125.

    Google Scholar 

  11. C. BARRET and T. B. MASSALSKI, in “Structure of metals” (Pergamon Press, Oxford, 1980) p. 204.

    Google Scholar 

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Authors and Affiliations

  1. Department of Chemical Engineering, Faculty of Enginering, Kyoto University, 606, Kyoto, Japan

    T. Maruyama & J. Shionoya

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  1. T. Maruyama
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  2. J. Shionoya
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Maruyama, T., Shionoya, J. Zinc oxide thin films prepared by chemical vapour deposition from zinc acetate. J Mater Sci Lett 11, 170–172 (1992). https://doi.org/10.1007/BF00724682

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  • DOI: https://doi.org/10.1007/BF00724682

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