Journal of Materials Science Letters

, Volume 11, Issue 2, pp 96–98 | Cite as

Deposition of tantalum nitride thin films from ethylimidotantalum complex

  • Hisn-Tien Chiu
  • Wen-Ping Chang


Polymer Thin Film Nitride Tantalum Tantalum Nitride 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.


  1. 1.
    M. WITTMER,Appl. Phys. Lett. 36 (1980) 456.Google Scholar
  2. 2.
    Idem, ibid.36 (1980) 540.Google Scholar
  3. 3.
    K. SUGIYAMA, S. PAC, Y. TAKAHASHI and S. MOTOJIMA,J. Electrochem. Soc. 122 (1975) 1545.Google Scholar
  4. 4.
    Y. TAKAHASHI, N. ONOYAMA, Y. ISHIKAWA, S. MOTOJIMA and K. SUGIYAMA,Chem. Lett. (1978) 525.Google Scholar
  5. 5.
    JOINT COMMITTEE FOR POWDER DIFFRACTION STANDARDS, Powder Diffraction File No. 32-1283 (JCPDS International Center for Diffraction Data, 1982).Google Scholar
  6. 6.
    Idem, Powder Diffraction File No. 19-1291 (1982).Google Scholar
  7. 7.
    M. M. BANASZAK HOLL, M. KERSTING, B. D. PENDLY and P. T. WOLCZANSKI,Inorg. Chem. 29 (1990) 1518.Google Scholar
  8. 8.
    M. M. BANASZAK HOLL, P. T. WOLCZANSKI and G. D. VAN DUYNE,J. Amer. Chem. Soc. 112 (1990) 7989.Google Scholar
  9. 9.
    G. B. STRINGFELLOW, in “Organometallic vapor-phase epitaxy: theory and practice” (Academic Press, San Diego, 1989) p. 262.Google Scholar
  10. 10.
    S. INGREY, M. B. JOHNSON and R. W. STREATER,J. Vacuum Sci. Technol. 20 (1982) 968.Google Scholar

Copyright information

© Chapman & Hall 1992

Authors and Affiliations

  • Hisn-Tien Chiu
    • 1
  • Wen-Ping Chang
    • 1
  1. 1.Department of Applied ChemistryNational Chiao Tung UniversityHsinchuTaiwan

Personalised recommendations