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Journal of Materials Science Letters

, Volume 11, Issue 2, pp 96–98 | Cite as

Deposition of tantalum nitride thin films from ethylimidotantalum complex

  • Hisn-Tien Chiu
  • Wen-Ping Chang
Article

Keywords

Polymer Thin Film Nitride Tantalum Tantalum Nitride 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Chapman & Hall 1992

Authors and Affiliations

  • Hisn-Tien Chiu
    • 1
  • Wen-Ping Chang
    • 1
  1. 1.Department of Applied ChemistryNational Chiao Tung UniversityHsinchuTaiwan

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