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Formation of microcrystallinity in hydrogenated silicon films deposited with a simple modification of the magnetron sputtering method

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Energy Research Unit, Indian Association for the Cultivation of Science, Jadavpur, 700 032, Calcutta, India

    A. K. Bandyopadhyay, S. N. Sharma, Ratnabali Banerjee, A. K. Batabyal & A. K. Barua

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  1. A. K. Bandyopadhyay
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  2. S. N. Sharma
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  3. Ratnabali Banerjee
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  4. A. K. Batabyal
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  5. A. K. Barua
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Bandyopadhyay, A.K., Sharma, S.N., Banerjee, R. et al. Formation of microcrystallinity in hydrogenated silicon films deposited with a simple modification of the magnetron sputtering method. J Mater Sci Lett 10, 1468–1470 (1991). https://doi.org/10.1007/BF00724408

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  • DOI: https://doi.org/10.1007/BF00724408

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