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MgO films deposited by chemical vapour deposition

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Journal of Materials Science Letters

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References

  1. K. KAMATA and S. MATSUMOTO,Yogyo-Kyokai-Shi 89 (1981) 337 (in Japanese).

    Google Scholar 

  2. K. KAMATA, S. MATSUMOTO and Y. SHIBATA, ibid.90 (1982) 54.

    Google Scholar 

  3. A. E. FEUERSANGER,Proc. IEEE 52 (1964) 1463.

    Google Scholar 

  4. F. K. LOTGERING,J. Inorg. Nucl. Chem. 9 (1959) 113.

    Google Scholar 

  5. M. O. ABOELFOTOH,Bull. Amer. Phys. Soc. 18 (1973) 495.

    Google Scholar 

  6. Idem,,J. Vac. Sci. Technol. 10 (1973) 621.

    Google Scholar 

  7. Idem,,Appl. Phys. Lett. 24 (1974) 347.

    Google Scholar 

  8. Idem,,J. Vac. Sci. Technol. 12 (1975) 67.

    Google Scholar 

  9. M. O. ABOELFOTOH, K. C. PARK and W. A. PLISKIN,J. Appl. Phys. 48 (1977) 2910.

    Google Scholar 

  10. K. R. DIXIT,Philos. Mag. 16 (1933) 1049.

    Google Scholar 

  11. D. M. EVANS and H. WILMAN,Acta. Crystallogr. 5 (1952) 731.

    Google Scholar 

  12. M. BALOG, M. SHIEBER, S. PATAI and M. MICHMAN,J. Cryst. Growth 17 (1972) 298.

    Google Scholar 

  13. L. BEN-DOR, R. DRUILHE and P. GIBART, ibid.24/25 (1974) 172.

    Google Scholar 

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Authors and Affiliations

  1. Department of Materials Science and Technology, Technological University of Nagaoka, 949-54, Nagaoka, Niigata, Japan

    Kiichro Kamata, Yoshishige Shibata & Yukio Kishi

Authors
  1. Kiichro Kamata
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  2. Yoshishige Shibata
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  3. Yukio Kishi
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Kamata, K., Shibata, Y. & Kishi, Y. MgO films deposited by chemical vapour deposition. J Mater Sci Lett 3, 423–426 (1984). https://doi.org/10.1007/BF00724383

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  • DOI: https://doi.org/10.1007/BF00724383

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