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Thinning of InP by chemical etching

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Journal of Materials Science Letters

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References

  1. G. T. BROWN, B. COCKAYNE and W. R. MACEWAN,J. Mater Sci. 15 (1980) 2539.

    Google Scholar 

  2. V. GOTTSCHALCH, R. SRNANEK and G. WAGNER,J. Mater. Sci. Lett. 1 (1982) 358.

    Google Scholar 

  3. S. MAHAJAN and A. K. CHIN,J. Crystal Growth 54 (1981) 138.

    Google Scholar 

  4. P. L. GILES, D. J. STIRLAND, P. D. AUGUSTUS, M. C. HALES, N. B. HASDELL and P. DAVIES, “Gallium Arsenide and Related Compounds 1980”, Inst. Phys. Conf. Ser. No. 56, edited by H.W. Thim (Institute of Physics, Bristol, London, 1981) p. 669.

    Google Scholar 

  5. T. KAMBAYASHI, C. KITAHARA and K. IGA,Jpn. J. Appl. Phys. 19 (1980) 79.

    Google Scholar 

  6. S. ADACHI, H. KAWAGUCHI and G. IWANE,J. Mater. Sci. 16 (1981) 2449.

    Google Scholar 

  7. K. FURUYA, L. A. COLDREN, B. I. MILLER and J. A. RENTSCHLER,Electronics Lett. 17 (1981) 582.

    Google Scholar 

  8. S. ADACHI, Y. NOGUCHI and H. KAWAGUCHI,J. Electrochem. Soc. 129 (1982) 1053.

    Google Scholar 

  9. A. R. CLAWSON, D. A. COLLINS, D. I. ELDER and J. J. MONROE, Techn. Note 592, Naval Ocean Systems Center, San Diego (1978).

  10. S. B. PHATAK and G. KELNER,J. Electrochem. Soc. 126 (1979) 287.

    Google Scholar 

  11. F. FIEDLER, A. SCHLACHETZKI and G. KLEIN,J. Mater. Sci. 17 (1982) 2911.

    Google Scholar 

  12. W. KERN,RCA Rev. 39 (1978) 278.

    Google Scholar 

  13. S. AYTAC and A. SCHLACHETZKI,Solid-State Electronics 25 (1982) 1135.

    Google Scholar 

  14. A. I. STOLLER, R. F. SPEERS and S. OPRESKO,RCA Rev. 30 (1970) 265.

    Google Scholar 

  15. J. FREYER,J. Electrochem. Soc. 122 (1975) 1238.

    Google Scholar 

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Authors and Affiliations

  1. Institut für Hochfrequenztechnik, Technische Universität Braunschweig, D-3300, Braunschweig, West Germany

    S. Aytac, A. Schlachetzki & H. -J. Prehn

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  1. S. Aytac
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  2. A. Schlachetzki
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  3. H. -J. Prehn
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Aytac, S., Schlachetzki, A. & Prehn, H.J. Thinning of InP by chemical etching. J Mater Sci Lett 2, 447–450 (1983). https://doi.org/10.1007/BF00723690

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  • DOI: https://doi.org/10.1007/BF00723690

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