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Surface-layer oxidation of copper-implanted aluminum nitride

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Central Research Laboratory, Sumitomo Cement Co. Ltd, 585 Toyotomi-cho, Funabashi-shi, 274, Chiba pref., Japan

    M. Yamada

  2. RIKEN (The Institute of Physical and Chemical Research), 2-1 Hirosawa, Wako-shi, 351-01, Saitama pref., Japan

    M. Iwaki

Authors
  1. M. Yamada
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  2. M. Iwaki
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Yamada, M., Iwaki, M. Surface-layer oxidation of copper-implanted aluminum nitride. J Mater Sci Lett 7, 1233–1234 (1988). https://doi.org/10.1007/BF00722346

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  • DOI: https://doi.org/10.1007/BF00722346

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