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Journal of Materials Science Letters

, Volume 9, Issue 12, pp 1435–1437 | Cite as

Thermally annealed phosphosilicate glass films deposited in the SiH4-PH3-O2-N2 system

  • R. Bantoiu
  • C. Pavelescu
Article

Keywords

Polymer Glass Film Phosphosilicate 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

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    P. BALTA and E. BALTA, “Introduction to the Physical Chemistry of the Vitreous State” (Abacus Press, 1976) p. 225.Google Scholar
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    O. K. T. WU and A. N. SAXENA, ibid.132 (1985) 932.Google Scholar
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    Y. SHIOYA and M. M. MAEDA, ibid.133 (1986) 1943.Google Scholar

Copyright information

© Chapman and Hall Ltd. 1990

Authors and Affiliations

  • R. Bantoiu
    • 1
  • C. Pavelescu
    • 1
  1. 1.R & D Center for Electronic Components (C CSIT-CE)BucharestRomania

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