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Preparation of orientated aluminium nitride films by radio-frequency reactive sputtering

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Department of Applied Chemistry, Faculty of Engineering, Nagoya University, Furo-cho, Chikusa-ku, 464, Nagoya, Japan

    K. Sugiyama, K. Taniguchi & K. Kuwabara

Authors
  1. K. Sugiyama
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  2. K. Taniguchi
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  3. K. Kuwabara
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Sugiyama, K., Taniguchi, K. & Kuwabara, K. Preparation of orientated aluminium nitride films by radio-frequency reactive sputtering. J Mater Sci Lett 9, 489–492 (1990). https://doi.org/10.1007/BF00721039

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  • DOI: https://doi.org/10.1007/BF00721039

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