Journal of Materials Science Letters

, Volume 8, Issue 5, pp 501–502 | Cite as

Laser-induced selective etching of YBa2Cu3O7−x films

  • U. Sudarsan
  • N. W. Cody
  • R. Solanki
Article
  • 9 Downloads

Keywords

Polymer Selective Etching 

References

  1. 1.
    P. M. MANKIEWICH, J. H. SCOFIELD, W. J. SKOCPOL, R. E. HOWARD, A. H. DAYEM and E. GOOD,Appl. Phys. Lett. 51 (1987) 1753.Google Scholar
  2. 2.
    M. GURVITCH and A. T. FIORY, ibid.51 (1987) 1027.Google Scholar
  3. 3.
    S. MATSUI, Y. OCHIAI, Y. KOJIMA, H. TSUGE, N. TAKADO, K. ASAKAWA, H. MATSUTERA, J. FUJITA, T. YOSHITAKE and Y. KUBO,J. Vac. Sci. Technol. B6 (1988) 900.Google Scholar
  4. 4.
    A. INAM, X. D. WU, T. VENKATESAN, S. B. OGALE, C. C. CHANG and D. DIJLEKAMP,Appl. Phys. Lett. 51 (1987) 1112.Google Scholar
  5. 5.
    M. SCHEUERMAN, C. C. CHI, C. C. TSUEI, D. S. YEE, S. J. CUOMO, R. B. LAIBOWITZ, R. H. KOCH, B. BRAREN, R. SRINIVASAN and M. M. PLECHATY, ibid.51 (1987) 1951.Google Scholar
  6. 6.
    R. SOLANKI, U. SUDARSAN and J. E. JOHNSON, ibid.52 (1988) 919.Google Scholar
  7. 7.
    N. W. CODY, U. SUDARSAN and R. SOLANKI, ibid.52 (1988) 1531.Google Scholar

Copyright information

© Chapman and Hall Ltd. 1989

Authors and Affiliations

  • U. Sudarsan
    • 1
  • N. W. Cody
    • 1
  • R. Solanki
    • 1
  1. 1.Department of Applied Physics and Electrical EngineeringOregon Graduate CenterBeavertonUSA

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