Journal of Materials Science Letters

, Volume 8, Issue 1, pp 98–101 | Cite as

Theoretical approach to chemical vapour deposition in the atomic system Ti-Si-C-CI-H

  • M. Touanen
  • F. Teyssandier
  • M. Ducarroir


Polymer Chemical Vapour Deposition Vapour Deposition Chemical Vapour Theoretical Approach 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.


  1. 1.
    F. TEYSSANDIER, C. BERNARD and M. DUCARROIR,J. Mater. Sci. 23 (1988) 135.Google Scholar
  2. 2.
    Idem, J. Electrochem. Soc. 135 (1988) 225.Google Scholar
  3. 3.
    T. HIRAI and T. GOTO,J. Mater. Sci. 16 (1981) 17.Google Scholar
  4. 4.
    Idem, Proceedings of the 10th International Conference on CVD, 18–23 October 1987, Honolulu, edited by G. W. Cullen (Electrochemical Society) p. 1074.Google Scholar
  5. 5.
    J. F. LARTIGUE, M. DUCARROIR and B. ARMAS, Proceedings of the 9th International Conference on CVD, 7–8 May 1984, Cincinnati, Ohio, USA, edited by D. Robinson, (Electrochemical Society) p. 561.Google Scholar
  6. 6.
    D. P. STINTON, W. F. LACKEY, R. J. LAUF and T. M. BESMANN.Proc. Ceram. Eng. Sci. 5 (July/August) (1984).Google Scholar
  7. 7.
    G. GARTNER, P. JANIEL and H. LYDTIN, Proceedings of the 6th European Conference on CVD, 29 March-3 April 1987, Jerusalem, edited by R. Porat, p. 319.Google Scholar
  8. 8.
    M. IGNAT, P. METAIS, C. BERNARD and M. DUCARROIR, accepted in the MRS spring Meeting April 1988, Reno, Nevada, USA.Google Scholar
  9. 9.
    C. E. BRUCKL, Technical Report AFML-TR-65-2, part II, Vol. VIII, December 1965.Google Scholar
  10. 10.
    J. J. NICKL and H. SPRINGER,Z. Metallkde 60 (1969) 136.Google Scholar
  11. 11.
    W. JEITSCHKO and H. NOWOTNY,Mh. Chem. 98 (1967) 329.Google Scholar
  12. 12.
    J. L. RATLIFF and G. W. POWELL, Technical Report AFML-TR-70-42, March 1970.Google Scholar
  13. 13.
    R. HULTGREN, “Selected Values of the Thermodynamic Properties of Binary Alloys” (American Society for Metals, 1973).Google Scholar
  14. 14.
    W. G. MOFFATT, “The Handbook of Binary Phase Diagrams” (Gernium, 1984).Google Scholar
  15. 15.
    K. K. SCHWEITZER, Dissertation Thesis, Ludwig Universität München (1976).Google Scholar
  16. 16.
    P. MARTINEAU, R. PAILLER, M. LAHAYE and R. NASLAIN,J. Mater. Sci. 19 (1984) 2749.Google Scholar
  17. 17.
    I. BARIN and O. KNACKE, “Thermochemical Properties of Inorganic Substances” (1973).Google Scholar
  18. 18.
    J. F. MILLION-BRODAZ, Dissertation Thesis, Institut National Polytechnique de Grenoble (1987).Google Scholar
  19. 19.
    SGTE data bank, THERMODATA domaine Universitaire Grenoble.Google Scholar
  20. 20.
    F. TEYSSANDIER, M. DURCARROIR and C. BERNARD,Calphad 8 (3) (1984) 233.Google Scholar
  21. 21.
    L. KAUFMAN and H. BERNSTEIN, “Computer Calculation of Phase Diagram” (Academic, 1970).Google Scholar
  22. 22.
    L. KAUFMAN and H. NESOR, Technical Report AFML-TR-73-56 (1973).Google Scholar
  23. 23.
    G. ERIKSSON,Chemica Scripta 4 (1973) 193.Google Scholar
  24. 24.
    L. KAUFMAN and H. NESORCalphad,2 (1) (1978) 35.Google Scholar
  25. 25.
    Idem, ibid.2 (4) (1978) 295.Google Scholar
  26. 26.
    J. J. NICKL, K. K. SCHWEITZER and P. LUXEMBERG,J. Less-Common Metals 26 (1972) 335.Google Scholar

Copyright information

© Chapman and Hall Ltd 1989

Authors and Affiliations

  • M. Touanen
    • 1
  • F. Teyssandier
    • 1
  • M. Ducarroir
    • 1
  1. 1.Institut de Science et de Génie, CNRSUniversité Avenue de VilleneuvePerpignon CedexFrance

Personalised recommendations