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The effect of deposition conditions on the refractive index of LTCVD SiO2 films

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Journal of Materials Science Letters

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References

  1. N. GOLDSMITH and W. KERN,RCA Rev. 28 (1967) 1531.

    Google Scholar 

  2. E. A. TAFT,J. Electrochem. Soc. 126 (1977) 1729.

    Google Scholar 

  3. C. COBIANU and C. PAVELESCU, ibid.130 (1983) 1888.

    Google Scholar 

  4. Idem, Thin Solid Films 102 (1983).

  5. C. PAVELESCU, C. COBIANU and A. VANCU,J. Electrochem. Soc. 130 (1983) 975.

    Google Scholar 

  6. C. COBIANU and C. PAVELESCU,Thin Solid Films 117 (1984) 211.

    Google Scholar 

  7. W. A. PLISKIN,J. Vac. Sci. Technol. 14 (1977) 1064.

    Google Scholar 

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Authors and Affiliations

  1. Microelectronica, Str. Erou Iancu Nicolae 34 B, R-72996, Bucharest, Romania

    C. Cobianu & C. Pavelescu

  2. IPRS Baneasa, Str. Erou Iancu Nicolae 32 A, R-72996, Bucharest, Romania

    A. Paunescu

Authors
  1. C. Cobianu
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  2. C. Pavelescu
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  3. A. Paunescu
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Cobianu, C., Pavelescu, C. & Paunescu, A. The effect of deposition conditions on the refractive index of LTCVD SiO2 films. J Mater Sci Lett 4, 1419–1420 (1985). https://doi.org/10.1007/BF00720117

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  • DOI: https://doi.org/10.1007/BF00720117

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