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Increasing the heat resistance of products made from vitreous silica for semiconductors

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Literature cited

  1. N. V. Solomin, The Heat-Resistance of Materials and Details Under a Load [in Russian], Stroiizdat, Moscow (1969).

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  2. Inventor's Certificate Nos. 1038306 and 1010032.

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Translated from Steklo i Keramika, No. 2, p. 18, February, 1986.

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Zhuravlev, G.I., Leiv, V.G., Serkova, N.G. et al. Increasing the heat resistance of products made from vitreous silica for semiconductors. Glass Ceram 43, 61–63 (1986). https://doi.org/10.1007/BF00697868

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  • DOI: https://doi.org/10.1007/BF00697868

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