Skip to main content
SpringerLink
Log in

A one-wavelength, in situ alignment method for rotating analyser ellipsometers

  • Contributed Papers
  • Published:
Applied Physics B Aims and scope Submit manuscript

Abstract

The mathematical background and method of an in situ alignment method for rotating analyser ellipsometers, that requests only one wavelength, is described. The method is especially useful in combination with a microcomputer. As a further consequence a balancing technique is obtained that confines the error to the pure statistical fluctuations.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. M.J. Dignam, M. Moskovits: Appl. Opt.9, 1868 (1970)

    Google Scholar 

  2. M.R. Steel: Appl. Opt.10, 2370 (1971)

    Google Scholar 

  3. J.H.P. Castelijns: Appl. Opt.14, 806 (1975)

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Fysisch Laboratorium, Katholieke Universiteit Nijmegen, Toernooiveld, Nijmegen, The Netherlands

    C. Wijers

Authors
  1. C. Wijers
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Wijers, C. A one-wavelength, in situ alignment method for rotating analyser ellipsometers. Appl. Phys. B 27, 5–8 (1982). https://doi.org/10.1007/BF00697289

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00697289

PACS

Search

Navigation