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Optical and electrical properties of laser-irradiated In2O3-4 mol % SnO2

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Abstract

The structural, electrical and optical properties of r.f. sputtered indium-tin oxide films on fused silica substrates and laser-treated films in air were investigated. The transmittance in the visible range was increased and the electrical resistivity was decreased by the laser treatment. The laser treatment was also found to annihilate dislocations and to promote grain growth. The improvement in these optical and electrical properties may be mainly due to the annihilation of defects such as vacancies and interstitials.

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Authors and Affiliations

  1. Department of Materials Processing, Faculty of Engineering, Tohoku University, 980, Sendai, Japan

    J. Echigoya, S. Kato & H. Enoki

Authors
  1. J. Echigoya
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  2. S. Kato
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  3. H. Enoki
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Echigoya, J., Kato, S. & Enoki, H. Optical and electrical properties of laser-irradiated In2O3-4 mol % SnO2 . J Mater Sci: Mater Electron 3, 168–171 (1992). https://doi.org/10.1007/BF00695515

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  • DOI: https://doi.org/10.1007/BF00695515

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