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N2 production in e-beam pumped XeF lasers containing NF3

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Abstract

The rate of build-up of N2 was measured in electron-beam-irradiated Ne/Xe/NF3 mixtures using mass spectroscopy. the amount of N2 produced indicated that N2 is the primary nitrogen bearing stable species created in these mixtures. The rate constant for dissociative electron attachment to the NF2 fragments produced in electron attachment to NF3 is estimated to be ∼5×10−8 cm3/s in order to explain the amount of N2 produced.

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This work was supported by DARPA under Contract No. DAA01-82-C-A125 and monitored by MICOM

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Slater, R. N2 production in e-beam pumped XeF lasers containing NF3 . Appl. Phys. B 42, 17–20 (1987). https://doi.org/10.1007/BF00694768

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  • DOI: https://doi.org/10.1007/BF00694768

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