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Differential amplitude contrast imaging in the scanning optical microscope

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Abstract

A split detector is used in a scanning optical microscope to produce high-quality differential amplitude contrast images. A slight lateral offset in the detector position is shown to introduce information about object height variations to the image. These results are compared with images obtained by electrical differentiation.

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Wilson, T., Hamilton, D.K. Differential amplitude contrast imaging in the scanning optical microscope. Appl. Phys. B 32, 187–191 (1983). https://doi.org/10.1007/BF00688286

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  • DOI: https://doi.org/10.1007/BF00688286

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