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Microstructure of SiC thin films produced on graphite by excimer-laser chemical vapour deposition

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Tsukuba Laboratories, National Research Institute for Metals, 1-2-1, Sengen, 305, Tsukuba, Ibaraki, Japan

    H. Suzuki, H. Araki & T. Noda

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  1. H. Suzuki
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  2. H. Araki
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  3. T. Noda
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Suzuki, H., Araki, H. & Noda, T. Microstructure of SiC thin films produced on graphite by excimer-laser chemical vapour deposition. J Mater Sci Lett 13, 49–52 (1994). https://doi.org/10.1007/BF00680271

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  • DOI: https://doi.org/10.1007/BF00680271

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