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Silica coating of aluminium nitride particles by radio-frequency plasma chemical vapour deposition

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Department of Chemical Science and Technology, Kyushu University, 6-10-1, Hakozaki, 812, Higashi-ku, Fukuoka, Japan

    K. Tsugeki, S. Yan, H. Maeida, K. Kusakabe & S. Morooka

Authors
  1. K. Tsugeki
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  2. S. Yan
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  3. H. Maeida
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  4. K. Kusakabe
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  5. S. Morooka
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Tsugeki, K., Yan, S., Maeida, H. et al. Silica coating of aluminium nitride particles by radio-frequency plasma chemical vapour deposition. J Mater Sci Lett 13, 43–45 (1994). https://doi.org/10.1007/BF00680269

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  • DOI: https://doi.org/10.1007/BF00680269

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