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References
F. R. Kessler, U. Barkow, and N. Unsner, Phys. Stat. Sol. (a),105, No. 2, 627–635 (1988).
N. I. Banis, N. A. Denisov, and A. V. Rezvov, Mikroeléktronika,17, No. 2, 113–118 (1988).
E. Hield, F. K. Vij, F. Corcuran, and G. Veigh, Solid State Electronics,32, No. 1, 69–76 (1989).
R. Nies, F. R. Kessler, U. Scheuermann, and H. Luka, J. Infrared Millimeter Waves,11, No. 2, 227–242 (1990).
K. U. Jeppson and D. Anderson, J. Electrochem. Soc.: Solid State Sci. Tech.,133, No. 2, 397–400 (1986),131, No. 11, 2675–2679 (1984).
O. L. Artemenko, G. V. Litvinovich, V. K. Matchenya, V. V. Nelaev, and B. B. Sevruk, Covariant Methods in Theoretical Physics. Optics and Acoustics [in Russian], Minsk (1991), pp. 22–28.
R. B. Fair and S. C. C. Tsai, J. Electrochem. Soc.: Solid State Sci. Tech.,124, No. 7, 1107–1118 (1977).
A. Slaui and P. Siffert, Phys. Stat. Sol (a),89, No. 2, 617–622 (1985).
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Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 59, No. 5–6, pp. 570–575, November–December, 1993.
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Artemenko, O.L., Litvinovich, G.V., Matchenya, V.K. et al. Spectrophotometric control of dope distribution profiles in laminated semiconductor structures. J Appl Spectrosc 59, 908–912 (1993). https://doi.org/10.1007/BF00664941
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DOI: https://doi.org/10.1007/BF00664941