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Rapid thermal annealing of indium-implanted gallium arsenide

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Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 59, Nos. 1–2, pp. 96–100, July–August, 1993.

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Akimov, A.N., Vlasukova, L.A., Komarov, F.F. et al. Rapid thermal annealing of indium-implanted gallium arsenide. J Appl Spectrosc 59, 533–536 (1993). https://doi.org/10.1007/BF00663365

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  • DOI: https://doi.org/10.1007/BF00663365

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