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Spectroellipsometric measurement of refractive index and thickness for HfO2 films on optical glass

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Literature cited

  1. A. V. Rzhanov (ed.), Principles of Ellipsometry [in Russian], Novosibirsk (1979).

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Authors and Affiliations

  1. T. G. Shevchenko Kiev State University, USSR

    V. A. Odarich, V. I. Panasyuk & V. S. Stashchuk

Authors
  1. V. A. Odarich
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  2. V. I. Panasyuk
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  3. V. S. Stashchuk
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Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 56, Nos. 5–6, pp. 827–830, May–June, 1992.

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Odarich, V.A., Panasyuk, V.I. & Stashchuk, V.S. Spectroellipsometric measurement of refractive index and thickness for HfO2 films on optical glass. J Appl Spectrosc 56, 510–512 (1992). https://doi.org/10.1007/BF00661757

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  • DOI: https://doi.org/10.1007/BF00661757

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