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Journal of Applied Spectroscopy

, Volume 46, Issue 4, pp 339–342 | Cite as

Using optical emission spectroscopy to regulate the composition of films prepared using cathode sputtering

  • V. P. Kireenko
  • V. M. Nesterenko
Article
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Keywords

Spectroscopy Analytical Chemistry Molecular Structure Optical Emission Emission Spectroscopy 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Plenum Publishing Corporation 1987

Authors and Affiliations

  • V. P. Kireenko
  • V. M. Nesterenko

There are no affiliations available

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