Journal of Applied Spectroscopy

, Volume 46, Issue 4, pp 339–342 | Cite as

Using optical emission spectroscopy to regulate the composition of films prepared using cathode sputtering

  • V. P. Kireenko
  • V. M. Nesterenko


Spectroscopy Analytical Chemistry Molecular Structure Optical Emission Emission Spectroscopy 
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Copyright information

© Plenum Publishing Corporation 1987

Authors and Affiliations

  • V. P. Kireenko
  • V. M. Nesterenko

There are no affiliations available

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