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Changes in the optical properties of films of silicon nitride, silicon oxinitride, and silicon oxide upon ion irradiation

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Authors
  1. N. N. Gerasimenko
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  2. T. I. Kovalevskaya
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  3. V. G. Pan'kin
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  4. K. K. Svitashev
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  5. G. M. Tseitlin
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Additional information

Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 26, No. 1, pp. 164–166, January, 1977.

The authors thank L. S. Smirnov for useful discussions and V. V. Voskoboinikov for providing the silicon nitride and silicon oxinitride films.

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Gerasimenko, N.N., Kovalevskaya, T.I., Pan'kin, V.G. et al. Changes in the optical properties of films of silicon nitride, silicon oxinitride, and silicon oxide upon ion irradiation. J Appl Spectrosc 26, 129–131 (1977). https://doi.org/10.1007/BF00640413

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  • DOI: https://doi.org/10.1007/BF00640413

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