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Fresenius' Journal of Analytical Chemistry

, Volume 343, Issue 9–10, pp 769–770 | Cite as

Ultratrace analysis of volatile organic compounds in semiconductor industry

  • W. Holzapfel
  • K. Budde
Symposium Papers

Summary

Recently it has been demonstrated that beside particles or metal impurities also organic contaminants have detrimental effects in semiconductor production. Ion Mobility Spectrometry (IMS) is a rather new, ultrasensitive method for analysis of organic compounds. After a short description of the method typical sources of organic contaminants are mentioned. Examples for IMS applications to semiconductor production and process control are given.

Keywords

Physical Chemistry Analytical Chemistry Inorganic Chemistry Organic Compound Detrimental Effect 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag 1992

Authors and Affiliations

  • W. Holzapfel
    • 1
  • K. Budde
    • 1
  1. 1.Siemens AG, Zentrale Forschung und EntwicklungMünchen 83Federal Republic of Germany

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