Fresenius' Journal of Analytical Chemistry

, Volume 343, Issue 9–10, pp 769–770 | Cite as

Ultratrace analysis of volatile organic compounds in semiconductor industry

  • W. Holzapfel
  • K. Budde
Symposium Papers


Recently it has been demonstrated that beside particles or metal impurities also organic contaminants have detrimental effects in semiconductor production. Ion Mobility Spectrometry (IMS) is a rather new, ultrasensitive method for analysis of organic compounds. After a short description of the method typical sources of organic contaminants are mentioned. Examples for IMS applications to semiconductor production and process control are given.


Physical Chemistry Analytical Chemistry Inorganic Chemistry Organic Compound Detrimental Effect 
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  1. 1.
    Ohmi T (1988) Microcontamination 6:16Google Scholar
  2. 2.
    Budde KJ (1991) Contamination Control and Failure Analysis by Ion Mobility Spectrometry, MRS Spring Meeting 29.4.–4.5. 91, Anaheim, CAGoogle Scholar
  3. 3.
    Kasi SR, Liehr M, Thiry PA, Dellaporta H, Offenberg M (1991) Appl Phys 59:108Google Scholar
  4. 4.
    Licciardello A, Puglisi O, Pignataro S (1986) Appl Phys Lett 48:41Google Scholar
  5. 5.
    Munson B (1977) Anal Chem 49:772AGoogle Scholar
  6. 6.
    Milne GWA, Lacey MJ (1974) Crit Rev Anal Chem, pp 73–94Google Scholar
  7. 7.
    Siegel MW, Fite WL (1976) J Phys Chem 80:2871Google Scholar
  8. 8.
    Revercomb HE, Mason EA (1975) Anal Chem 47:970Google Scholar

Copyright information

© Springer-Verlag 1992

Authors and Affiliations

  • W. Holzapfel
    • 1
  • K. Budde
    • 1
  1. 1.Siemens AG, Zentrale Forschung und EntwicklungMünchen 83Federal Republic of Germany

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