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Ion beam induced atomic mixing in Fe/Al bilayered samples

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Abstract

Atomic mixing of Fe/Al bilayered samples induced by an energetic xenon beam has been studied by RBS-TEM and sheet resistivity measurements. Mixing is detected at 2.5 × 1015 Xe/cm2 and then proceeds up to 2 × 1016 Xe/cm2. A blocking effect of the mixing for larger doses is observed. Homogeneous concentration is not obtained across the sample. Instead a pronounced graded composition is reached. Several explanations of the mixing process and the subsequent blocking effect are suggested: — sharp gradients in the nuclear energy deposition profile which decrease with dose — grain growth phenomena — precipitation of crystalline xenon acting as efficient annihilation sinks for vacancies.

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Gaboriaud, R.J., Jaouen, C., Grob, J.J. et al. Ion beam induced atomic mixing in Fe/Al bilayered samples. Appl. Phys. A 41, 127–135 (1986). https://doi.org/10.1007/BF00631120

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