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Diamond thin film growth by microwave plasma chemical vapour deposition and investigation by scanning tunnelling/force microscopy and scanning electron microscopy

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Journal of Materials Science Letters

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References

  1. R. J. Wedlake, in “Properties of diamond”, edited by J. E. Field (Academic Press, London).

  2. F. P. Bundy, H. T. Hall, H. M. Strong andR. H. Wentorf,Nature 176 (1955) 51.

    Google Scholar 

  3. P. K. Bachmann,Adv. MateR. 2 (1990) 195.

    Google Scholar 

  4. R. C. de Veris, General Electric Corporate Research and Development Technical Report 86CRD247 (1987).

  5. S. Iijima, Y. Aikawa andK. Baba,Appl. Phys. LetT. 57 (1990) 2646.

    Google Scholar 

  6. A. R. Badzian andT. Badzian,Surf. Coating TechnoL. 36 (1988) 283.

    Google Scholar 

  7. B. E. Williams andJ. T. Glass,J. Mater. ReS. 4 (1989) 373.

    Google Scholar 

  8. B. E. Williams, J. T. Glass, R. F. Davis, K. K. Obashi andT. Hariuchi,J. Vacuum Sci. TechnoL. A6 (1988) 1819.

    Google Scholar 

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Authors and Affiliations

  1. School of Electrical and Electronic Engineering, Nanyang Technological University, Republic of Singapore

    Jaeshin Ahn, F. H. Tan & H. S. Tan

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  1. Jaeshin Ahn
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  2. F. H. Tan
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  3. H. S. Tan
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Ahn, J., Tan, F.H. & Tan, H.S. Diamond thin film growth by microwave plasma chemical vapour deposition and investigation by scanning tunnelling/force microscopy and scanning electron microscopy. J Mater Sci Lett 12, 775–778 (1993). https://doi.org/10.1007/BF00626719

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  • DOI: https://doi.org/10.1007/BF00626719

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