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The angular distributions of sputtered indium atoms at different temperature

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Journal of Materials Science Letters

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References

  1. P. Sigmund, in “Sputtering by particle bombardment I”, edited byR. Behrisch (Springer-Verlag, Berlin, 1981) p. 8.

    Google Scholar 

  2. H. H. Andersen, B. Btenum, J. Sorensen andH. J. Whitlow,Nucl. Instrum. MetH. B6 (1985) 459.

    Google Scholar 

  3. Wang Zhenxia, Zhang Jiping, Pan Jisheng andTao Zhenlan,Phys. LetT. A164 (1992) 227.

    Google Scholar 

  4. Chen Shoumian, Wang Zhenxia, Pan Jisheng andZhen Liping,Acta Phys. Sinica 38 (1989) 1785 (in Chinese).

    Google Scholar 

  5. Zhang Jiping, Wang Zhenxia, Tao Zhenlan andPan Jisheng,J. Mater. Sci. LetT. 11 (1992) 194.

    Google Scholar 

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Authors and Affiliations

  1. Institute of Nuclear Research, Academia Sinica, PO Box 800-204, 201800, Shanghai, People's Republic of China

    Zhang Jiping, Wang Zhenxia, Tao Zhenlan & Pan Jisheng

Authors
  1. Zhang Jiping
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  2. Wang Zhenxia
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  3. Tao Zhenlan
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  4. Pan Jisheng
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Jiping, Z., Zhenxia, W., Zhenlan, T. et al. The angular distributions of sputtered indium atoms at different temperature. J Mater Sci Lett 12, 747–748 (1993). https://doi.org/10.1007/BF00626708

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  • DOI: https://doi.org/10.1007/BF00626708

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