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The angular distribution of sputtered atoms and the influence of topographic features

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Journal of Materials Science Letters

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Authors and Affiliations

  1. T. D. Lee Physics Laboratory, Fudan University, 200433, Shanghai

    Wang Zhenxia, Pan Jisheng, Zhang Jiping & Tao Zhenlan

  2. Institute of Nuclear Research, Academia Sinica, P.O. Box 800-204, 201800, Shanghai, People's Republic of China

    Pan Jisheng, Zhang Jiping & Tao Zhenlan

Authors
  1. Wang Zhenxia
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  2. Pan Jisheng
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  3. Zhang Jiping
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  4. Tao Zhenlan
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Zhenxia, W., Jisheng, P., Jiping, Z. et al. The angular distribution of sputtered atoms and the influence of topographic features. J Mater Sci Lett 13, 1585–1587 (1994). https://doi.org/10.1007/BF00626517

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  • DOI: https://doi.org/10.1007/BF00626517

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