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Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 35, No. 5, pp. 872–874, November, 1981.
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Bosyakov, M.N., Zaikov, A.A. & Labuda, A.A. Spectral investigation of polymerization processes during the plasma etching of silicon films. J Appl Spectrosc 35, 1259–1261 (1981). https://doi.org/10.1007/BF00624126
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DOI: https://doi.org/10.1007/BF00624126