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Applied Physics A

, Volume 39, Issue 3, pp 167–171 | Cite as

New types of periodic structures in laser-induced chemical vapor deposition

  • Y. C. Du
  • U. Kempfer
  • K. Piglmayer
  • D. Bäuerle
  • U. M. Titulaer
Contributed Papers

Abstract

New types of periodic structures that occur in laser-induced chemical vapor deposition have been investigated, mainly for polycrystalline Si deposited on glass substrates covered with a thin amorphous Si layer. These periodic structures, which are believed to be a general phenomenon in pyrolytic laser-induced processing, limit the resolution obtainable in direct writing of patterns.

PACS

42.60. -v 81.15 Gh 68.20. +t 

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Copyright information

© Springer-Verlag 1986

Authors and Affiliations

  • Y. C. Du
    • 1
  • U. Kempfer
    • 1
  • K. Piglmayer
    • 1
  • D. Bäuerle
    • 1
  • U. M. Titulaer
    • 2
  1. 1.Angewandte PhysikJohannes-Kepler-Universität LinzLinzAustria
  2. 2.Theoretische PhysikJohannes-Kepler-Universität LinzLinzAustria

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