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Applied Physics A

, Volume 30, Issue 3, pp 147–149 | Cite as

Laser grown single crystals of silicon

  • D. Bäuerle
  • G. Leyendecker
  • D. Wagner
  • E. Bauser
  • Y. C. Lu
Contributed Papers

Abstract

Single crystal rods of silicon have been grown by laser-induced chemical vapor deposition (LCVD) using visible light. We believe these to be the first reported single crystals of any material grown by LCVD.

PACS

81.15.Gh 61.50.Cj 42.60.-v 

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References

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    For a review see e.g.: D. Bäuerle: InLaser Diagnostics and and Photochemical Processing for Semiconductor Devices, ed. by R.M. Osgood and S.R.J. Brueck. (North-Holland, New York 1983)Google Scholar
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Copyright information

© Springer-Verlag 1983

Authors and Affiliations

  • D. Bäuerle
    • 1
  • G. Leyendecker
    • 1
  • D. Wagner
    • 1
  • E. Bauser
    • 2
  • Y. C. Lu
    • 2
  1. 1.Angewandte PhysikJohannes-Kepler-UniversitätLinzAustria
  2. 2.Max-Planck-Institut für FestkörperforschungStuttgart 80Germany

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