Applied Physics A

, Volume 48, Issue 4, pp 347–354 | Cite as

Ion beam mixing of Al/Fe binary systems

  • B. Rauschenbach
  • M. Posselt
  • R. Küchler
Solids and Materials


Ion beam mixing of Al layers on Fe and Fe layers on Al are studied by irradiation with 200 keV Xe+-ions at room temperature as a function of the thickness of the top layer and of the ion fluence from 5×1015 to 7.5×1016ions/cm2. Deconvolution procedures are needed to separate the influence of the ion sputter profiling by AES from the ion beam induced mixing effects. Auger electron spectroscopy data reveal that the mixing induced diffusivity ought to be considered as a function of concentration. The diffusion coefficients are evaluated by the Boltzmann-Matano method. A strong dependence of the diffusion coefficients and also the mixing efficiencies from the ion dose, the depth of the interface and the nuclear energy deposition were observed. Results are discussed in terms of the diffusional and collisional mixing as well as chemical affinity of both Fe and Al.


61.80 68.35Fx 


Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.


  1. 1.
    M. Iwaki, Y. Okabe, K. Takahashi, K. Yoshida: Nucl. Instr. Meth.209/210, 941 (1983)Google Scholar
  2. 2.
    M. Nastasi, R. Fastow, J.W. Mayer, S.J. Plimpton, E.D. Wolf, B.M. Ulrich: Nucl. Instr. Meth. B7/8, 585 (1985)Google Scholar
  3. 3.
    C. Jaouen, J.P. Riviera, A. Bellara, J. Delafond: Nucl. Instr. Meth. B7/8, 591 (1985)Google Scholar
  4. 4.
    R.J. Gaboriaud, C. Jaouen, J.J. Grob, A. Grob: Appl. Phys. A41, 127 (1986)Google Scholar
  5. 5.
    R.J. Gaboriaud, J.J. Grob, F. Abel: Nucl. Instr. Meth. B19/20, 648 (1987)Google Scholar
  6. 6.
    V.P. Godbole, S.M. Chaudhari, S.V. Ghaisas, S.M. Kanetkar, S.O. Ogable, V.G. Bhide: Phys. Rev. B31, 5703 (1985)Google Scholar
  7. 7.
    B. Rauschenbach, K. Hohmuth, K. Hennig: InLaser Proceeding and Diagnostics, ed. by D. Bäuerle, K.L. Kompa, L. Laude, Proc. Europ. Mater. Res. Soc. (Strasbourg 1986) p. 199Google Scholar
  8. 8.
    B. Rauschenbach, K. Hohmuth: Nucl. Instr. Meth. B23, 316 (1987)Google Scholar
  9. 9.
    D.A. Lilienfeldt, I.S. Hung, J.W. Mayer: Nucl. Instr. Meth. B19/20, 1 (1987)Google Scholar
  10. 10.
    B. Rauschenbach, V. Heera: J. Mater. Sci. Lett6, 401 (1987)Google Scholar
  11. 11.
    B.X. Liu, G.A. Cheng, C.H. Shang: Philos. Mag. Lett.55, 265 (1987)Google Scholar
  12. 12.
    B. Rauschenbach, R. Küchler, M. Posselt, R. Dietsch: Vacuum (to be published)Google Scholar
  13. 12.a
    B. Rauschenbach, K. Hohmuth, R. Küchler, M. Posselt: Proc. IBMM-88, Tokio, published in Nucl. Instr. Meth. B (1988)Google Scholar
  14. 13.
    H.H. Andersen: Appl. Phys.18, 131 (1979)Google Scholar
  15. 14.
    S. Hofmann: InPractical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy, ed. by D. Briggs, M.P. Seah (Wiley, Chichester 1983) p. 141Google Scholar
  16. 15.
    R.S. Averback: Nucl. Instr. Meth. B15, 675 (1986)Google Scholar
  17. 16.
    P.G. Shewmon:Diffusion in Solids (McGraw-Hill, New York 1963)Google Scholar
  18. 17.
    J.P. Biersack, L.G. Haggmark: Nucl. Instr. Meth.174, 257 (1980)Google Scholar
  19. 18.
    J.F. Ziegler, J.P. Biersack, U. Littmark:The Stopping and Range of Ions in Solids (Pergamon, New York 1985)Google Scholar
  20. 19.
    M. Posselt, J.P. Biersack: Nucl. Instr. Meth. B15, 20 (1986)Google Scholar
  21. 20.
    A. Traverse, M.G. LeBoite, L. Nevot, B. Prado, J. Corno: Appl. Phys. Lett.51, 1901 (1987)Google Scholar
  22. 21.
    P.M. Paine, R.S. Averback: Nucl. Instr. Meth. B7/8, 666 (1985)Google Scholar
  23. 22.
    K. Hohmuth, V. Heera, B. Rauschenbach: Proc. IBMM-88, Tokio 1988, published in Nucl. Instr. Meth. B (1988)Google Scholar
  24. 23.
    F. d'Heurle, J.E.E. Baglin, G.L. Clark: J. Appl. Phys.57, 1426 (1985)Google Scholar
  25. 24.
    J.E.E. Baglin, J.M. Poate: InThin Films — Interdiffusion and Reactions, ed. by J.M. Poate, K.N. Tu, J.W. Mayer (Wiley, New York 1978) p. 305Google Scholar
  26. 25.
    L. Kaufmann, H. Nesor: Metall. Trans.5, 1623 (1974)Google Scholar

Copyright information

© Springer-Verlag 1989

Authors and Affiliations

  • B. Rauschenbach
    • 1
  • M. Posselt
    • 1
  • R. Küchler
    • 1
  1. 1.Central Institute for Nuclear Research RossendorfAcademy of Science of the GDRDresdenGerman Democratic Republic

Personalised recommendations