Skip to main content
SpringerLink
Log in

Si etching affected by ir laser irradiation

  • Contributed Papers
  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

Silicon was etched in an aqueous solution of sodium hydroxide under ir laser irradiation. Two types of lasers were used, a Nd:YAG laser with a wavelength of λ=1.06 μm and a CO2 laser with λ=10.6 μm. Small-size blind holes, through holes and reliefs were formed on a Si target, and even a special type of hole can be formed with help of a CO2 laser, namely a blind hole with a hillock in its center.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. T.J. Chuang: J. Chem. Phys.72, 6303 (1980)

    Google Scholar 

  2. T.J. Chuang: J. Chem. Phys.74, 1453 (1981)

    Google Scholar 

  3. D.J. Ehrlich, R.M. Osgood, Jr., T.F. Deutsch: Appl. Phys. Lett.38, 1018 (1981)

    Google Scholar 

  4. R.M. Osgood, Jr., A. Sanchez-Rubio, D.J. Ehrlich, V. Damen: Appl. Phys. Lett.40, 391 (1982)

    Google Scholar 

  5. R.J. von Gutfeld, R.T. Hodgson: Appl. Phys. Lett.40, 352 (1982)

    Google Scholar 

  6. B.S. Luk'yanchuk, A.A. Koklin: Preprint No. 128 (in Russian)

  7. F.V. Bunkin, B.S. Luk'yanchuk, G.A. Shafeev: Pis'ma Zh. Tekh. Fiz. (USSR)39, 441 (1984)

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. General Physics Institut of Academy of Sciences of the USSR, Moscow, USSR

    F. V. Bunkin, B. S. Luk'yanchuk & G. A. Shafeev

  2. Moscow State University, Moscow, USSR

    E. K. Kozlova, A. I. Portniagin & A. A. Yeryomenko

  3. Institut of Experimental Physics, University of Szeged, Szeged, Hungary

    P. Mogyorosi

  4. Clinic of ENT, Medical University of Szeged, Szeged, Hungary

    J. G. Kiss

Authors
  1. F. V. Bunkin
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. B. S. Luk'yanchuk
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. G. A. Shafeev
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. E. K. Kozlova
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. A. I. Portniagin
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. A. A. Yeryomenko
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. P. Mogyorosi
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. J. G. Kiss
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Bunkin, F.V., Luk'yanchuk, B.S., Shafeev, G.A. et al. Si etching affected by ir laser irradiation. Appl. Phys. A 37, 117–119 (1985). https://doi.org/10.1007/BF00618861

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00618861

PACS

Search

Navigation