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Computer simulation of two-component target sputtering

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Abstract

The TRIM SP computer simulation program, which is based on the binary collision approximation, is applied to sputtering of two component targets. The topics discussed in this paper are: contribution of different processes leading to sputtering, total and partial sputtering yields, surface compositions at stationary conditions, sputtering of isotopic mixtures, angular and energy distributions and the escape depth of sputtered particles. Targets investigated are TaC, WC, TiC, TiD2, and B (as an isotope mixture), bombarded by the noble gas ions and D (in the case of TiD2). Comparison with experimental data and calculated results show good agreement demonstrating that collisional effects are sufficient to describe the experimental data in the examples investigated.

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Authors and Affiliations

  1. EURATOM Association, Max-Planck-Institut für Plasmaphysik, D-8046, Garching bei München, Germany

    W. Eckstein

  2. Hahn-Meitner-Institut für Kernforschung, D-1000, Berlin 39

    J. P. Biersack

Authors
  1. W. Eckstein
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  2. J. P. Biersack
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Eckstein, W., Biersack, J.P. Computer simulation of two-component target sputtering. Appl. Phys. A 37, 95–108 (1985). https://doi.org/10.1007/BF00618859

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  • DOI: https://doi.org/10.1007/BF00618859

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