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Sputtering of multicomponent materials

Numerical solution of the balance equation

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Abstract

The nonlinear balance equation, describing the evolution of concentration profiles for a multicomponent target under the action of ion bombardment as a function of the depth inside the target and the incident ion fluence, was solved numerically. The quantities of interest have been calculated with reference to a binary system showing that the balance equation is consistent with the correct stoichiometry for the sputtering yield ratio in the stationary state.

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References

  1. H.H. Andersen: SPIG 1980, ed. by M. Matic, Boris Kidric Institute of Nuclear Science, Beograd, Yugoslavia, p. 421

    Google Scholar 

  2. N. Andersen, P. Sigmund: Mat. Fys. Medd. Dan. Vid. Selsk.39, No. 3 (1974); inAtomic Collisions in Solids, ed. by S. Datz. (Plenum Press, New York 1975), p. 115; and Physics of Ionized Gases 1974, Book of Contributed Papers, Inst. Phys. Zagreb (1974) p. 91

  3. P. Sigmund: Phys. Rev.184, 383 (1969);187, 768 (1969)

    Google Scholar 

  4. P. Sigmund: Rev. Roum. Phys.17, 823, 969, 1079 (1972)

    Google Scholar 

  5. P. Sigmund, A. Oliva, G. Falcone: Nucl. Instrum. Methods194, 541 (1982)

    Google Scholar 

  6. P. Sigmund, A. Gras-Marti: Nucl. Instrum. Methods182/183, 25 (1981)

    Google Scholar 

  7. W.O. Hofer, U. Littmark: Phys. Lett. A71, 457 (1979)

    Google Scholar 

  8. P. Sigmund: J. Appl. Phys.50, 7261 (1979)

    Google Scholar 

  9. F.B. Hildebrand:Introduction to Numerical Analysis (McGraw-Hill, New York 1956)

    Google Scholar 

  10. G.E. Forsythe, W.R. Wasow:Finite Difference Methods for Partial Differential Equations (Wiley, New York 1960)

    Google Scholar 

  11. J. Douglas, Jr.: Adv. Computers2, 1 (1961)

    Google Scholar 

  12. The computer code is written in FORTRAN and is still in expansion in order to provide other kinds of calculations; in the present form the output furnishes for each material the concentration profile as a function of the incident ion fluence and of the depth inside the target. A note on the final version of the code will be published probably under the form of internal report

  13. G. Falcone, P. Sigmund: Appl. Phys.25, 307 (1981)

    Google Scholar 

  14. We are grateful to the referee who pointed out this feature

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Authors and Affiliations

  1. Physics Department, University of Calabria, Arcavacata di Rende, I-87036, Cosenza, Italy

    G. Falcone & A. Oliva

Authors
  1. G. Falcone
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  2. A. Oliva
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Falcone, G., Oliva, A. Sputtering of multicomponent materials. Appl. Phys. A 33, 175–178 (1984). https://doi.org/10.1007/BF00618751

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  • DOI: https://doi.org/10.1007/BF00618751

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