Abstract
A titanium-layer of approximately 90 nm thickness has been homogeneously loaded with deuterium by implantation and diffusion. Desorption was studied by use of28Si ions of up to 20 MeV energy (and other ions). The spectrum of the elastic-recoil-detection method serves as indication of the released and retained amount of deuterium. The retained deuterium is recorded as a function of the employed ion dose and is converted into a desorption rate as a function of the retained deuterium concentration. — A one-dimensional theory considering transitions from vacuum to surface and surface to Ti volume (and back) leads to a system of equations, the solutions of which allow adaptation to the experiment and therefore an evaluation with respect to certain characteristic parameters. — Some of the results might be influenced by the high concentration of C and O impurities.
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