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IR absorption spectra of thin films of aluminum oxide produced by a high-frequency gas-discharge plasma

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Authors
  1. R. P. Kalnynya
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  2. I. A. Éimanis
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  3. I. É. Églitis
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  4. I. A. Feltyn'
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Additional information

Translated from Zhurnal Prikladnoi Spektroskopii, Vol.25, No.3, pp. 488–492, September, 1976.

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Kalnynya, R.P., Éimanis, I.A., Églitis, I.É. et al. IR absorption spectra of thin films of aluminum oxide produced by a high-frequency gas-discharge plasma. J Appl Spectrosc 25, 1147–1150 (1976). https://doi.org/10.1007/BF00618033

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  • DOI: https://doi.org/10.1007/BF00618033

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