Journal of Superconductivity

, Volume 2, Issue 2, pp 211–218 | Cite as

A superconducting magnetic levitation device for the transport of light payloads

  • D. Wolfshtein
  • T. E. Seidel
  • D. W. JohnsonJr.
  • W. W. Rhodes


A device for the frictionless transport of light payloads, e.g., silicon wafers, using superconducting magnetic levitation has been demonstrated. The device consists of an array of rigidly connected “carrier” magnets levitating above a corresponding array of superconducting discs. Silicon wafers placed on the carrier have been linearly transported with velocities up to 50 cm/s. The configuration provides for excellent lateral stability. Studies of the height and lateral friction effects (caused by flux pinning) were measured as a function of payload mass. Future applications may include the frictionless transport of silicon wafers in vacuum environments.

Key words

transport magnetic levitation superconductor 


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Copyright information

© Plenum Publishing Corporation 1989

Authors and Affiliations

  • D. Wolfshtein
    • 1
  • T. E. Seidel
    • 2
  • D. W. JohnsonJr.
    • 3
  • W. W. Rhodes
    • 3
  1. 1.Center for Robotic Systems in Microelectronics (CRSM)University of CaliforniaSanta Barbara
  2. 2.SematechAustin
  3. 3.AT&T Bell LaboratoriesMurray Hill

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