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Applied Physics A

, Volume 37, Issue 1, pp 25–30 | Cite as

Photothermal effect contribution on film quality improvement in excimer-laser induced metal CVD

  • H. Yokoyama
  • F. Uesugi
  • S. Kishida
  • K. Washio
Contributed Papers

Abstract

KrF excimer laser induced Cr film deposition from Cr(CO)6 has been studied. Remarkable film quality dependence on laser intensity suggested the photothermal effect contribution of intensive uv laser pulses in the CVD process. A cw Ar-ion laser light and its second harmonic light were used, to separate photochemical and photothermal effects. As a result, photoinduced surface heating has been found to be very important for obtaining good quality metallic films in KrF laser induced Cr film CVD.

PACS

81.10 68.55 68.20 

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Copyright information

© Springer-Verlag 1985

Authors and Affiliations

  • H. Yokoyama
    • 1
  • F. Uesugi
    • 1
  • S. Kishida
    • 1
  • K. Washio
    • 1
  1. 1.Opto-Electronics Research LaboratoriesNEC CorporationKanagawaJapan

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