Skip to main content
Log in

Cathode etching rate in abnormal glow discharges

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

The cathode etching rate in an abnormal glow discharge was calculated taking into account sputtering both by ions and energetic neutrals originating in cathode dark space due to the charge exchange collisions. The advantage of the model proposed is the evaluation of energetic neutral scattering by the sputtering gas.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. I. Abril, A. Gras-Marti, J.A. Vallés-Abarca: J. Vac. Sci. Technol. A4, 1773 (1986); Vacuum37, 391 (1987)

    Google Scholar 

  2. I. Abril, A. Gras-Marti, J.A. Valles-Abarca: Phys. Rev. A28, 3677 (1983); J. Phys. D: Appl. Phys.17, 1841 (1984)

    Google Scholar 

  3. D.G. Armour, H. Valizadeh, F.A.H. Soliman, G. Carter: Vacuum34, 300 (1984)

    Google Scholar 

  4. J. Rickards: Vacuum34, 559 (1984)

    Google Scholar 

  5. R.S. Robinson: J. Vac. Sci. Technol.16, 185 (1979)

    Google Scholar 

  6. E.W. McDaniel:Collision Phenomena in Ionized Gases (Wiley, New York 1964)

    Google Scholar 

  7. H.H. Andersen, H.L. Bay: InSputtering by Particle Bombardment, Topics Appl. Phys., ed. by R. Behrisch (Springer, Berlin, Heidelberg 1981) Chap. 3

    Google Scholar 

  8. S.A. Schwarz, C.R. Helms: J. Appl. Phys.50, 5492 (1979)

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Czekaj, D., Hollmann, E.K., Kozirev, A.B. et al. Cathode etching rate in abnormal glow discharges. Appl. Phys. A 48, 573–574 (1989). https://doi.org/10.1007/BF00617859

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00617859

PACS

Navigation