Applied Physics A

, Volume 48, Issue 6, pp 543–547 | Cite as

Analysis of ionic fragments from 308 nm photoablation of polyimide

  • E. E. B. Campbell
  • G. Ulmer
  • K. Bues
  • I. V. Hertel
Surfaces, Interfaces and Layar Structures


The ionic products from excimer laser photoablation (λ=308 nm) of polyimide (Kapton) film have been studied as a function of fluence. Large ion masses up to about 900a.m.u. are easily observed, the mass distribution depending strongly on the fluence. Velocities of the emitted particles lie between 1400 and 10 000 ms−1, again dependent on the fluence. A mechanism to explain the high velocities is suggested consisting of ionisation of the surface polymer molecules followed by a Coulomb explosion combined with expansion of the high density gas formed by the photoablation.


79.20.Ds 82.80.Ms 


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  1. 1.
    P.E. Dyer, J. Sidhu: J. Appl. Phys.57, 1420 (1985)Google Scholar
  2. 2.
    R. Srinivasan, B. Braren, R.W. Dreyfus: J. Appl. Phys.61, 372 (1987)Google Scholar
  3. 3.
    R. Larciprete, M. Stuke: Appl. Phys. B42, 181 (1987)Google Scholar
  4. 4.
    D. Feldmann, J. Kutzner, J. Laukemper, S. MacRobert, K.H. Welge: Appl. Phys. B44, 81 (1987)Google Scholar
  5. 5.
    G. Koren: Appl. Phys. B46, 147 (1988)Google Scholar
  6. 6.
    G.M. Davis, M.C. Gower, C. Fotakis, T. Efthimiopoulos, P. Argyrakis: Appl. Phys. A36, 27 (1985)Google Scholar
  7. 7.
    B. Danielzik, N. Fabricius, M. Röwekamp, D. von der Linde: Appl. Phys. Lett.48, 212 (1986)Google Scholar
  8. 8.
    J.H. Brannon, J.R. Lankard, A.I. Baise, F. Burns, J. Kaufman: J. Appl. Phys.58, 2036 (1985)Google Scholar
  9. 9.
    C.E. Sroog: J. Polym. Sci. Macromol. Rev.11, 161 (1976)Google Scholar
  10. 10.
    W.C. Wiley, I.H. McLaren: Rev. Sci. Instr.26, 1150 (1955)Google Scholar
  11. 11.
    E. Andrew, P.E. Dyer, D. Forster, P.H. Key: Appl. Phys. Lett.43, 717 (1983)Google Scholar
  12. 12.
    B.J. Garrison, R. Srinivasan: J. Appl. Phys.57, 2909 (1985)Google Scholar

Copyright information

© Springer-Verlag 1989

Authors and Affiliations

  • E. E. B. Campbell
    • 1
  • G. Ulmer
    • 1
  • K. Bues
    • 1
  • I. V. Hertel
    • 1
  1. 1.Fakultät für Physik, UniversitätFreiburgFed. Rep. Germany

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